Kemhūnapereti whakakanapa wafer aluminaHe mea hanga te tēpu /huri ki te alumina parakore 99.7-99.9%. He tino pakari te uku alumina parakore, ā, he tino ātete ki te kakahu mō te whakakanapa i te papa, ā, ka mau tonu te āhua o te mata mō te wā roa. He mea hanga e te PIBM. He mema ia nō te umanga haurua-ira nā tōna pumau wera me te āhua me te ātete ki ngā taiao taputapu tukatuka maramara iti.
Ko te Whakamahere Matū-Mīhini (CMP), e mōhiotia ana ko te Whakakanapa Matū-Mīhini, he hangarau i roto i te tukanga hanga o ngā taputapu haurua-ira. Ka whakamahia te waikura matū me ngā kaha miihini hei whakahāngai i ngā papa silicon, i ētahi atu rauemi papa rānei i te wā e tukatukahia ana.
E rua ngā wāhanga matua o ngā taputapu CMP: te wāhanga whakakanapa me te wāhanga horoi. E whā ngā wāhanga o te wāhanga whakakanapa, arā, e toru ngā papa hurihuri whakakanapa me te kōwae uta me te tango i te wafer. Ko te wāhanga horoi te kawenga mō te horoi me te whakamaroke i te wafer kia "maroke ki roto, ki waho" hoki o te wafer. I roto i ngā taputapu whakakanapa katoa, he mahi nui tā ngā uku alumina.
Ko ngā uku alumina e whakamahia ana hei hanga i ngā kōpae whakakanapa wafer, e hiahia ana ki te parakore teitei, te pakari matū teitei, me te whakahaere pai i te āhua me te taratara o te mata.
He mea hanga te kōpae huri uku Chemshun 99.7% Al2O3 mai i ngā rauemi uku matatau, he mea pai mō te huri pai o ngā rauemi rerekē, inā koa mō te huri i ngā rauemi pakarukaru pēnei i ngā papa, ngā uku me te karāhe. Ka taea te hanga i tā mātou kōpae huri uku ki ngā rahi rerekē e ai ki ngā tauira huri me te whakakanapa rerekē.
Wā tuku: Mei-30-2025